http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0221270-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 1988-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f7f6ba89edade38770276b1b1a75e22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4f9c79c52a72a8b4b79eb98fee318915 |
| publicationDate | 1990-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H0221270-A |
| titleOfInvention | Probe apparatus |
| abstract | PURPOSE: To achieve a higher reliability of inspection by bringing a contact section of a probe card containing copper or silver at a part of conductors arrayed corresponding to an electrode train of a body to be inspected into electric contact with the body to be inspected. n CONSTITUTION: A probe card 3 is made up of a non-elastically deformable support 4, a crystal plate 5 compensating for a heat distortion or the like, a probe terminal section 6 and a conducting pattern 7. A series of the terminal section 6 and the pattern 7 is formed corresponding to two trains of electrode pads of an LCD substrate 1 being insulated. Silver or copper is formed at a terminal section by electrolytic plating. The substrate 1 and the card 3 moved in a manner as to access each other relatively to make the terminal section 6 abut an electrode pad 2. Furthermore, the substrate 1 is lifted and with a overdriving, the terminal section 6 is connected accurately to the pad 2. This enables accurate and highly reliable inspection with a higher electric conductivity of a conductor. n COPYRIGHT: (C)1990,JPO&Japio |
| priorityDate | 1988-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID418354341 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23978 |
Total number of triples: 15.