http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H02194501-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9d5ebd9bdc11f7a4b267d7e865d5a84f http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8385e1bea84b6a852e3ea7a52d8738bb |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-335 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01C7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-42 |
| filingDate | 1989-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_18e984db14ce79e410f15487a247dda6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_691c4411b27e5526534e1ca7e9fce0f7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_feb5df48f0ac973c4b5c94b8b9c5b0cc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_869dce6cf2b4d716cde8b38387786557 |
| publicationDate | 1990-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H02194501-A |
| titleOfInvention | Resistor |
| abstract | PURPOSE: To stabilize characteristics of electric resistance even under a condition of a large temperature change by using a composite material of a compound composed of a combination of three elements, i.e., zirconium, silicon and carbon, especially by using a composite material of zirconium carbide and silicon carbide. n CONSTITUTION: A vacuum tank 1 is first evacuated to produce a vacuum; zirconium 3 evaporated by using an electron-beam evaporation apparatus 2. A prescribed voltage and a prescribed electric current are arranged to be applied on an ionization electrode 4 and a discharge plasma is formed. Then, after an electric discharge has been stabilized, tetramethylsilane(Si(CH 3 ) 4 ) gas is introduced; a reactive ion plating operation is executed by means of zirconium and tetramethylsilane; a thin film is formed on a ceramic substrate 5 which has been placed at the upper part of a zirconium evaporation source. Thereby, a composite film 8 composed mainly of zirconium carbide and silicon carbide can be formed; it is possible to obtain an extremely excellent characteristic as a heat-generating resistor such as a thermal head or the like. n COPYRIGHT: (C)1990,JPO&Japio |
| priorityDate | 1989-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.