http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H02183140-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b8ca6ee864e0448264aa0f90630b89c3 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-511 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-69 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N15-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N15-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N15-14 |
| filingDate | 1989-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5fdc53d970d45c1749d800391700c90e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4c9b18d10a89bd343ad36f6e1b497372 |
| publicationDate | 1990-07-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H02183140-A |
| titleOfInvention | Fine particle measuring apparatus |
| abstract | PURPOSE: To enable implementing of quantitative measurement of fine particles and identification of components thereof by arranging a capillary tube, a microwave source, a cavity, a magnet for generation mirror magnetic fields, an introduction tube, an analysis means and an exhaust means. n CONSTITUTION: A microwave is introduced into a cavity 204 through a waveguide 203 from a microwave source 202 to meet resonance conditions of a cyclotron so that electrons are accelerated with a cyclotron motion to achieve a higher dissociation effect of neutral particles. Under such a condition, when a carrier gas CG of an argon gas or helium gas flows to an introduction pipe 206, a plasma PL is formed. When the plasma is confined by a mirror magnetic field with a magnet 208, the electrons are accelerated many times in this area to obtain a higher electron density and when the electron density reaches about 10 12 -10 13 /cm 3 , an exciting temperature is produced enough to dissociate a solid. Fine particles in a sample gas SG introduced to the plasma PL are dissociated by the plasma to be ionized. The plasma thus obtained by such an electron cyclotron resonance permits dissociation and ionization of a solid with a diameter of 0.1-0.05μm even under a reduced pressure. The fine particles ionized have an emission spectrum intrinsic to components. This emission is detected by an analysis means 209. n COPYRIGHT: (C)1990,JPO&Japio |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010078616-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6432838-B1 |
| priorityDate | 1989-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.