| abstract |
PURPOSE: To provide a photopolymerizable mixture for photoresist which is highly resistant to processing solution in hardened state by forming the mixture from a high molecular weight binder, an (alk)acrylate having a photooxidizable group, a specified photoreductive dye and a trihalomethyl compound. n CONSTITUTION: (A) A high molecular weight binder (e.g.: PVA or the like), (B) an (alk)acrylate of polyvalent alcohol having a photooxidizable group under the presence of a photoreductive dye in exposure, (C) a photoreductive dye formed of benzo(thio)xanthene dye as photopolymerization initiator, and (D) a trihalomethyl compound cleavable by light emission are blended. As the component D, 2,4-bis-trichloromethyl-6-(4styrylphenyl)-s-triazine or the like is preferred. As the component A, for example, a reaction product of glycizyl(alk)acrylate with hydroxyalkylamine is given. n COPYRIGHT: (C)1990,JPO |