http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H02123657-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J49-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J49-06 |
| filingDate | 1988-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_04afca02df61316bf73e8932dad86fe3 |
| publicationDate | 1990-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H02123657-A |
| titleOfInvention | Mass spectrograph device for secondary ion |
| abstract | PURPOSE: To lengthen the lifetime of an objective diaphragm used for making a fine ion beam in a primary optical system by using tungsten as the material of the diaphragm. n CONSTITUTION: The objective diaphragm of a mass spectrograph device for a secondary ion is directly exposed to a primary ion beam generated in a primary ion optical system and, therefore, put in the condition where excessive deterioration takes due to a beam sputter. In order to restrain the deterioration, it is necessary to use a material having a high sputter rate and a high fusion point, and tungsten is used as the material of the objective diaphragm. n COPYRIGHT: (C)1990,JPO&Japio |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6037587-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107579027-A |
| priorityDate | 1988-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23964 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425762086 |
Total number of triples: 15.