http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H01302823-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e5db580deca7130dbe51805c6c608b35 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 |
| filingDate | 1988-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_249134be689cbc0d3642d044031f18d4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_390f927e8c42f12cbb15a388acf087f2 |
| publicationDate | 1989-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H01302823-A |
| titleOfInvention | Flattening of semiconductor substrate |
| abstract | PURPOSE: To prevent diffusion of P atom from a phosphor transformation silicon layer used for flattening and to increase production yield as well as reliability by performing spin coating of phosphorus modified silicone resin on an oxide thin film and then flattening it after forming the oxide thin film on a substrate to be treated. n CONSTITUTION: After forming an oxide thin film on a substrate to be treated as a method for flattening the stage difference produced on a semiconductor substrate to be treated by an insulation layer, a phosphorus modified silicone resin is spin-coated on the oxide thin film by spin coating and is flattened. The phosphorus modified silicone resin in a structure as shown in Figure is obtained by allowing, for example, methyltrimethoxysilane or tetramethoxysilane to hydrolysis and condensation polymerization, and by converting a hydroxyl group of the resulting low molecular polymer into phosphoric ester with chlorophosphoric acid. Then, after forming SiOx on Si water wherein surface stage difference has been produced by the CVD method, phosphorus modified silicon resin liquid dissolved in methylisobutyl ketone is spin-coated on it to allow 1μm thick phosphorus modified silicone resin layer to be formed. n COPYRIGHT: (C)1989,JPO&Japio |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6423651-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0837190-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6828258-B2 |
| priorityDate | 1988-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 32.