abstract |
PURPOSE: To make it possible to form an ultrathin film on a number of sheets of substrates simultaneously by a method wherein a plurality of reaction parts are provided on an epitaxial growing chamber, and raw gas is fed to each reaction part successively. n CONSTITUTION: Four independent reaction containers 1W4 are provided in a quartz container 5, and carbon susceptors 6, on which a plurality of substrate crystals 7 are placed, are provided in the four reaction containers 1W4. Also, there are an AsH 3 gas cylinder 9, a DEGaCl bubbler 10, a DMInCl container 11, and H 2 gas 12, which becomes a carrier in gas introducing systems 9W20, and the flow rate of each gas is controlled by a flow rate controlling device 13. The DEGaCl gas and the AsH 3 gas are supplied from the reaction container 1 by staggering the time and switching to the containers 2W4. As a result, a highly uniform superthin film can be formed simultaneously on a large number of substrates having a large area in a highly efficient manner. n COPYRIGHT: (C)1989,JPO&Japio |