http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H01296511-A

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filingDate 1988-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a98eae879399281c03b007f8e1421054
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publicationDate 1989-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-H01296511-A
titleOfInvention Formation process for color indicator part on transparent conductive membrane and its device
abstract PURPOSE: To produce a color indicator part with no stepwise difference in thickness by preparing a color indicator part on the transparent conductive membrane that is formed on a transparent substrate through reduction of the part to be formed in an indicator part by means of hydrogen plasma. n CONSTITUTION: Each surface of an indium tin oxide transparent conductive membrane(ITO membrane) formed on a transparent glass substrate, an antimony- added tin oxide transparent conductive membrane (SnO 2 :Sb membrane), and a fluorine-added tin oxide transparent membrane (SnO 2 :F membrane) is covered with aluminum mask and mounted on a transparent, conductive substrate, holding device to be exposed to radiation of ECR hydrogen plasma. By this radiation all of the ITO, SnO 2 :Sb and SnO 2 :F membranes undergo a significant reduction in their light transmission factors with no notable change in their surface resistance values. Numerically a color indicator spot is reduced in thickness but the reduction is so small that the grade of stepwise difference associated with it is ignorable. n COPYRIGHT: (C)1989,JPO&Japio
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Total number of triples: 29.