http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H01252781-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_68d3ebbd805b053b07b9452ba0fa6d24 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J27-08 |
| filingDate | 1988-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_484b8087dced97fe4bfab8c1ec9f024b |
| publicationDate | 1989-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H01252781-A |
| titleOfInvention | Plasma cvd device utilizing pressure gradient type discharge |
| abstract | PURPOSE: To maintain arc discharge of large current and to stably generate high-density metallic plasma by making a gaseous metallic compd. to plasma with a plasma CVD device utilizing a pressure gradient type discharge plasma source. n CONSTITUTION: A cathode region between a cathode 1 and an intermediate electrode 2 is held at several Torr and the inside of a vacuum vessel 6 is held at 10 -3 Torr or below. A carrier gas for discharge is introduced through an introduction port 7 and a gaseous metallic compd. (e.g., TiCl 4 ) is introduced through the introduction ports 8 provided among the intermediate electrodes 2, 3, 4 and reactive gas is introduced through an introduction port 10. Simultaneously, voltage is impressed to both the cathode 1 and an anode 5 to generate plasma and discharging plasma electron current 13 is introduced into the vacuum vessel 6 with a magnetic field 14 and the metallic ion is allowed to react with the reactive gas and coating is performed on a sample 12. Thereby ionization efficiency is improved and coating can be performed. n COPYRIGHT: (C)1989,JPO&Japio |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007035952-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5679167-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9606517-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5217761-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5853815-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016509333-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150093713-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10032610-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5182002-A |
| priorityDate | 1988-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419548916 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24193 |
Total number of triples: 23.