| abstract |
PURPOSE:To improve sensitivity, resolution, resistance to oxygen plasma, and preservation stability of a pattern forming material by dissolving a specified silicone resin in an org. solvent. CONSTITUTION:A pattern forming material is prepd. by dissolving a silicone resin expressed by the formula wherein R1 is a 1-5C alkyl group or 2-6C alkenyl group; R2 is a divalent aromatic hydrocarbon group; each (m) and (n) is an integer 0-100,000; (m+n) is >=10. Preferred org. solvents are aromatic solvents such as toluene, hexane, etc., or alcoholic or ketonic solvents. Preferred concn. of the silicone resin is 1-50wt.%. R2 is most pref. phenylene. |