http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H01183372-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0950e9df7f0e1b73efee1bda859951ad |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D7-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D7-14 |
| filingDate | 1988-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3b11e96a6fb2e10a3fc3dae1b7581c6e |
| publicationDate | 1989-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H01183372-A |
| titleOfInvention | Grindstone |
| abstract | PURPOSE: To perform the processes from rough grinding to finish grinding by one path by setting heights of projected grindstone fragments in annular shapes laminated at least doubly on the holding part of a rotating shaft to become higher from the outside to the inside. n CONSTITUTION: There is provided a coaxial three layer structure of grindstone fragments 2, wherein the outermost layer, medium layer and innermost layer are formed with a rough grindstone fragment 5, finish grindstone fragment 6 and finish grindstone fragment 7, respectively. Such the grindstone fragments 2 are mounted on the holding part 1 (basic metal part) of a rotational shaft. The heights of the three grindstone fragments 5W7 are set to become higher from the outside to the inside while the grain sizes of the abrasive grains are set to become thinner from the outside to the inside. In grinding a semi-conductor wafer using such the cup type grindstone, the wafer is abutted sequentially on the rough grindstone fragment 5, medium grindstone fragment 6 and finish grindstone fragment 7 under rotation of the grindstone, thus it is possible to sequentially perform the processes from rough grinding to finish grinding by one path. n COPYRIGHT: (C)1989,JPO&Japio |
| priorityDate | 1988-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID711845 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416065973 |
Total number of triples: 13.