http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H01116464-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5547f741b25666fc4ae5195cf71a979b |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 1987-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b6f99aeb99a946bb234db282bfbde45 |
| publicationDate | 1989-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H01116464-A |
| titleOfInvention | Tester for semiconductor device |
| abstract | PURPOSE: To prevent adhesion of dew, a water drop or the like to a semiconductor device by controlling a pressure tank with the driving or controlling of a fan heater, humidifier and a pressurizer installed to the pressure tank to uniformize temperature and humidity within the pressure tank. n CONSTITUTION: A carrying section T for a sample semiconductor device 3 and fans 12 and 13 are disposed on the bottom in a pressure tank M, which is provided with a temperature sensor 5a and a pressure sensor 5b. A airconditioning type humidifier 2 and humidifying valve 11 are controlled by a control section 9 from information of the sensors 5a and 5b. The fans 12 and 13 are driven or controlled to uniformize temperature and humidity within the pressure tank M. This prevents a stress due to dew or a water drop from working on the device 3 in the pressure tank M. n COPYRIGHT: (C)1989,JPO&Japio |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103154696-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103154696-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9176506-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102478645-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012051746-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102486535-A |
| priorityDate | 1987-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962 |
Total number of triples: 19.