| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2223-611
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2442
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2223-07 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-20091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-088
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78618
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1251
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7869
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-8234 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8234
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-088
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 |
| filingDate |
2019-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2023-01-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2023-01-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-7201508-B2 |
| titleOfInvention |
semiconductor equipment |
| priorityDate |
2019-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |