| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1454
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02024
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 |
| filingDate |
2018-02-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2022-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2022-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-7185533-B2 |
| titleOfInvention |
Silicon substrate intermediate polishing composition and silicon substrate polishing composition set |
| priorityDate |
2017-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |