http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7157304-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-62 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-02 |
| filingDate | 2018-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2022-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-7157304-B2 |
| titleOfInvention | semiconductor equipment |
| priorityDate | 2018-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.