http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7156999-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-318 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 |
| filingDate | 2019-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-10-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2022-10-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-7156999-B2 |
| titleOfInvention | Silicon-containing compound for forming silicon-containing thin film, and method for forming silicon-containing thin film |
| priorityDate | 2019-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 55.