http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7100778-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 |
| filingDate | 2022-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-07-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2022-07-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-7100778-B1 |
| titleOfInvention | Power supply unit for electrostatic chuck and electrostatic chuck |
| abstract | PROBLEM TO BE SOLVED: To provide a power feeding unit for an electrostatic chuck and an electrostatic chuck capable of reducing a difference in thermal expansion coefficient from a substrate and ensuring a power feeding function. An electrostatic chuck including a mounting plate 1 on which a sample is placed, a substrate 2 integrated with the mounting plate, and an internal electrode 3 provided between the mounting plate and the substrate. The electrostatic chuck feeding unit 4 is provided so as to penetrate the substrate 2 in order to supply power to the internal electrode 3. The feeding unit 4 is a composite sintered body containing the substrate main component particles having the same main component as the main component of the substrate 2 and the conductive particles, and the substrate main component particles are 55% by volume or more and 90% by volume or less. It contains 10% by volume or more and 45% by volume or less of the conductive particles, and the structure includes the substrate main component particles and the matrix portion existing at the grain boundary of the substrate main component particles, and the conductive particles are present in the matrix portion. Moreover, when the average particle size of the main component particles of the substrate is R1 and the average particle size of the conductive particles is R2, R1 / R2 is 1.6 or more. [Selection diagram] Fig. 1 |
| priorityDate | 2022-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.