http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7076570-B2
Outgoing Links
Predicate | Object |
---|---|
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
filingDate | 2019-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2022-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2022-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-7076570-B2 |
titleOfInvention | Sensitive ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, manufacturing method of electronic device |
priorityDate | 2018-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 156.