| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-20 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66462
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02052
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7787 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-02 |
| filingDate |
2020-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2022-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2022-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-7060060-B2 |
| titleOfInvention |
Manufacturing method of compound semiconductor substrate for epitaxial growth, epitaxial growth method on compound semiconductor substrate and compound semiconductor substrate |
| priorityDate |
2011-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |