http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7042892-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-25 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F5-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H3-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F9-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F9-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F5-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-25 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H3-08 |
| filingDate | 2020-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2022-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-7042892-B1 |
| titleOfInvention | Method for manufacturing hollow package and method for providing photosensitive composition |
| abstract | PROBLEM TO BE SOLVED: To provide a method for manufacturing a hollow package and a method for providing a photosensitive composition capable of suppressing corrosion of aluminum wiring constituting the hollow package. SOLUTION: A step of forming a side wall on a substrate having aluminum wiring (first step S1) and forming a top plate portion on the side wall to produce the hollow structure for accommodating the aluminum wiring. The photosensitive composition having the step (second step S2) and forming the side wall and / or the top plate portion is characterized by containing an anion represented by the general formula (I1-an). do. In the general formula (I1-an), A is a heteroatom. X is a halogen atom. R is a monovalent organic group. k is an integer of 1 to 6. m is an integer of 0 to 5, and n is an integer of 1 to 3. m / (k + m) is 0 or more and less than 0.7. [Chemical 1] [Selection diagram] Fig. 1 |
| priorityDate | 2020-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 303.