http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7039865-B2
Outgoing Links
Predicate | Object |
---|---|
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C33-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C59-02 |
filingDate | 2017-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2022-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2022-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-7039865-B2 |
titleOfInvention | Pattern forming method, uneven structure manufacturing method, replica mold manufacturing method, resist pattern reformer and pattern forming system |
priorityDate | 2017-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 56.