http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7029068-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01G41-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F15-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23G5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-302 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23G5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G41-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F15-00 |
| filingDate | 2018-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2022-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-7029068-B2 |
| titleOfInvention | Tungsten oxide treatment method and tungsten hexafluoride manufacturing method |
| priorityDate | 2017-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 33.