http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6986425-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F5-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02329 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02129 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-225 |
| filingDate | 2017-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-6986425-B2 |
| titleOfInvention | Impurity diffusing agent composition and semiconductor substrate manufacturing method |
| priorityDate | 2016-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 399.