http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6971082-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 2017-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-6971082-B2 |
| titleOfInvention | Semiconductor device inspection method, semiconductor device manufacturing method, and inspection device |
| priorityDate | 2017-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9863 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419549006 |
Total number of triples: 11.