| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2218-112
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2217-253 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-45
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B19-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4486
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-288 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-448
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 |
| filingDate |
2015-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2021-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2021-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-6945120-B2 |
| titleOfInvention |
Metal film forming method |
| priorityDate |
2014-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |