Predicate |
Object |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-3092 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D36-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D15-361 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D29-62 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-16 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B9-032 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B9-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32 |
filingDate |
2018-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2021-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate |
2021-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-6943888-B2 |
titleOfInvention |
Chemical solution manufacturing method and chemical solution manufacturing equipment |
priorityDate |
2017-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |