http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6918916-B2

Outgoing Links

Predicate Object
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-327
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0217
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02211
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-3323
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0228
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0217
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32834
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32568
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4587
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-509
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-318
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-509
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46
filingDate 2019-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2021-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2021-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-6918916-B2
titleOfInvention Plasma generator, substrate processing equipment, semiconductor equipment manufacturing method, program executed by the substrate processing equipment, plasma generation method, program executed by the plasma generator, electrodes and reaction tubes
priorityDate 2016-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6101053
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426453095
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426098976
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457277700
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5391
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID102295364
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410550605
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID83601
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524320
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419517759
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID137752
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415777329
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61330
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520721
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410500872
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6327210
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419543920
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24811
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452768268
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123195
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6098404
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID139070
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123185
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415777190
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID83497
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451241001
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID71351278
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61622
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410555733
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410573691
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419518429
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID37715
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID74123
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419516414
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10290728
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407174045
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415836895
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123218717
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419546203
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123423848

Total number of triples: 68.