http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6901389-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2851 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2875 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2898 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2862 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 2017-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-6901389-B2 |
| titleOfInvention | Testing integrated circuit equipment in an inert gas |
| priorityDate | 2016-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 17.