http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6885871-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01G41-006 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F11-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-448 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 |
| filingDate | 2016-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-6885871-B2 |
| titleOfInvention | High-purity tungsten hexacarbonyl for solid source delivery |
| priorityDate | 2015-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.