http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6852566-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C59-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C33-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2017-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-6852566-B2 |
| titleOfInvention | Pattern forming method, uneven structure manufacturing method, replica mold manufacturing method, resist pattern reformer and pattern forming system |
| priorityDate | 2017-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 48.