http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6809779-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B53-017 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B53-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2015-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-01-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-01-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-6809779-B2 |
| titleOfInvention | Polishing pads, polishing pad conditioning methods, pad conditioning agents, their use |
| priorityDate | 2015-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 144.