http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6787206-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-04 |
| filingDate | 2017-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-6787206-B2 |
| titleOfInvention | Silicon-containing film forming composition for resist process, silicon-containing film and pattern forming method |
| priorityDate | 2017-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 97.