http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6668066-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-005 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C19-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-60 |
| filingDate | 2015-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-6668066-B2 |
| titleOfInvention | Method for manufacturing mask blank substrate, method for manufacturing mask blank, and method for manufacturing exposure mask |
| priorityDate | 2015-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 15.