http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6667730-B1

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classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-0454
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filingDate 2019-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2020-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2020-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-6667730-B1
titleOfInvention Ozone supply device and ozone supply method
abstract High-concentration ozone remaining in the previous supply step was leaked and discarded in the next adsorption step. Therefore, a first adsorption / desorption tower (3a) and a second adsorption / desorption tower (3b), and an exhaust gas circuit (R0) for discharging gas discharged from the first adsorption / desorption tower (3a) to the outside of the apparatus, A gas circuit for adsorption and recovery (R1) for passing the gas discharged from the first adsorption / desorption tower (3a) through the second adsorption / desorption tower (3b) and then to the outside of the apparatus; A circuit switch (5) for switching the flow path of the recovery gas circuit (R1), and a circuit switch (5) according to the state of the first adsorption / desorption tower (3a) and the state of the second adsorption / desorption tower (3b). ) For controlling the opening and closing of the control unit.
priorityDate 2019-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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Total number of triples: 23.