http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6667730-B1
Outgoing Links
Predicate | Object |
---|---|
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2259-402 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2256-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2257-106 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-0454 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B13-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B13-0259 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-0423 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B13-10 |
filingDate | 2019-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2020-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2020-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-6667730-B1 |
titleOfInvention | Ozone supply device and ozone supply method |
abstract | High-concentration ozone remaining in the previous supply step was leaked and discarded in the next adsorption step. Therefore, a first adsorption / desorption tower (3a) and a second adsorption / desorption tower (3b), and an exhaust gas circuit (R0) for discharging gas discharged from the first adsorption / desorption tower (3a) to the outside of the apparatus, A gas circuit for adsorption and recovery (R1) for passing the gas discharged from the first adsorption / desorption tower (3a) through the second adsorption / desorption tower (3b) and then to the outside of the apparatus; A circuit switch (5) for switching the flow path of the recovery gas circuit (R1), and a circuit switch (5) according to the state of the first adsorption / desorption tower (3a) and the state of the second adsorption / desorption tower (3b). ) For controlling the opening and closing of the control unit. |
priorityDate | 2019-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.