http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6652652-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-285 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-08 |
| filingDate | 2016-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-6652652-B2 |
| titleOfInvention | Semiconductor device manufacturing method and substrate processing apparatus |
| priorityDate | 2016-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 81.