| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-008
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-026
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2885 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-026
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-001
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D3-38 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D17-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D7-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D17-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D17-10 |
| filingDate |
2017-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2020-02-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2020-02-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-6650072-B2 |
| titleOfInvention |
Apparatus for performing vertical electric metal film formation on a substrate |
| priorityDate |
2016-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |