patent/JP-6632967-B2

Predicate	Object
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-80 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-62 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-66
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C23-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C19-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C15-00
filingDate	2016-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	2020-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate	2020-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	JP-6632967-B2
titleOfInvention	Photomask substrate, photomask blank, photomask, method for manufacturing photomask substrate, method for manufacturing photomask, and method for manufacturing display device
priorityDate	2015-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Predicate	Subject
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453983605 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID180504

Total number of triples: 19.