http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6597922-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-96 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-505 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-62222 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67207 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67242 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6719 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C24-04 |
| filingDate | 2019-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-6597922-B1 |
| titleOfInvention | COMPOSITE STRUCTURE, SEMICONDUCTOR MANUFACTURING APPARATUS HAVING COMPOSITE STRUCTURE AND DISPLAY MANUFACTURING APPARATUS |
| abstract | PROBLEM TO BE SOLVED: To provide a ceramic coat having excellent particle resistance and to provide a method for evaluating the particle resistance of a ceramic coat. A composite structure including a base material and a structure having a surface provided on the base material, wherein the structure includes polycrystalline ceramics, and is calculated from a TEM image analysis thereof. A composite structure in which the luminance Sa satisfies a predetermined value can be suitably used as an internal member of a semiconductor manufacturing apparatus that requires particle resistance. [Selection figure] None |
| priorityDate | 2018-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 38.