http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6535574-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J201-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-301 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J7-20 |
| filingDate | 2015-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-6535574-B2 |
| titleOfInvention | Film for semiconductor manufacturing process |
| priorityDate | 2015-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 53.