| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-3183
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-31813
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-31919
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2856
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-3187 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8234
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-822
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-82
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-088
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03K19-177
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-04 |
| filingDate |
2015-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2018-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-6444752-B2 |
| titleOfInvention |
apparatus |
| priorityDate |
2014-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |