| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4481
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F5-003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D7-63
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F15-065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F15-045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F13-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F15-0046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F19-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-2284
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K5-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F1-005 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F15-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F15-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D7-63
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F1-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-22 |
| filingDate |
2014-06-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2018-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-6440695-B2 |
| titleOfInvention |
Vapor source using a precursor tertiary amine solution |
| priorityDate |
2013-06-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |