http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6425850-B1
Outgoing Links
Predicate | Object |
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classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J4-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J7-00 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4481 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-448 |
filingDate | 2018-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2018-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2018-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-6425850-B1 |
titleOfInvention | Solid material container and solid material product in which solid material container is filled with solid material |
abstract | The present invention provides a solid material container capable of reducing the mixing of metal impurities into the solid material caused by the material of the solid material container by a simple method and configuration. A solid material container (1) for vaporizing and supplying a solid material (25) contained therein includes a carrier gas introduction pipe (11), a solid material lead pipe (12), an outer part (21) made of metal, and the solid substance. It has an inner portion 22 filled with a material 25 and at least a portion in contact with the solid material 25 made of a nonmetallic material, and a lid 23 at least a portion in contact with the solid material 25 made of a nonmetallic material The inner portion 22 and the lid portion 23 are housed inside the outer portion 21. [Selected figure] Figure 1 |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020128566-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I741495-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11613809-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7240881-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113366143-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11566326-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I743674-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020128565-A |
priorityDate | 2017-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 66.