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filingDate 2017-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2018-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2018-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-6384688-B1
titleOfInvention Piezoelectric element and piezoelectric element application device
abstract A piezoelectric element and a piezoelectric element application device capable of achieving high piezoelectric characteristics by reducing lattice defects are provided. A vibration plate, a first electrode formed on the vibration plate, a piezoelectric layer formed by stacking a plurality of piezoelectric films formed on the first electrode, and a piezoelectric layer A piezoelectric element having a second electrode formed thereon, wherein the piezoelectric layer is made of a perovskite type complex oxide represented by a general formula ABO 3 containing lead, zirconium and titanium. The molar ratio (A / B) of the A site to the B site of the composite oxide is 1.14 or more and 1.22 or less. In the current time curve measurement, the amount of current in the time when the current starts to decrease and increases is defined as the relaxation current. Then, the activation energy calculated from the relaxation current by the Arrhenius plot is 0.6 [eV] or less. [Selection] Figure 18
priorityDate 2017-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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