Predicate |
Object |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L2203-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31111 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G18-69 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K5-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F236-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L47-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F290-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D175-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D175-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0388 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-032 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-035 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G18-348 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K3-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G18-6541 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G18-6208 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K5-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K5-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K5-053 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G18-755 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J151-08 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-035 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-032 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G63-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G18-69 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F290-06 |
filingDate |
2014-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2018-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate |
2018-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-6379404-B2 |
titleOfInvention |
Manufacturing method of substrate having pattern and resin composition for hydrofluoric acid etching |
priorityDate |
2013-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |