| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B22F2201-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B22F2201-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-3321 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0623
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3414
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C22C28-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C22C9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B22F3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3426 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B22F3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C22C9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B22F3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B22F3-15 |
| filingDate |
2014-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2018-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-6365922-B2 |
| titleOfInvention |
Sputtering target and manufacturing method thereof |
| priorityDate |
2013-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |