http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6361505-B2

Outgoing Links

Predicate Object
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K3-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K3-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-547
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K2003-329
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-80
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-103
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-0682
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2254
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D11-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D11-03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D11-102
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1804
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1864
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1876
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-04
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-068
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-225
filingDate 2014-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2018-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2018-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-6361505-B2
titleOfInvention Impurity diffusion composition and method for manufacturing semiconductor device
priorityDate 2013-07-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450777822
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415769221
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID297
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415783257
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID525767
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425356381
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414883544
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407302049
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24752
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450418934
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61254
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412232921
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426217278
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412232838
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61868
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22051772
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422976333
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420533490
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415712565
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID57315280
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422976337
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410146523
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422135252
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66187
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62308
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524917
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415769220
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14182
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8452
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID430874838
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15532216
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411290724
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419490211
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450500715
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15287
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22594815
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458397310
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524028
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID81284
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410567938
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415745643
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18193
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID423138109
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66827
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21226428
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8289
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87318159
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12691392
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559581
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID75691
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410540078
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415733499
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410535324
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410573453
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17100
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422152037
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID79694
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3610038
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419526254
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21903124
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419537837
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421316603
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12711
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415772498
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414862896
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21896169
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID76478
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419564268
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID517273
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407882389
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419530477
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512377
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18137
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12712
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414879359
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415893423
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419596818
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21884977
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3780918
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415841623
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID70210
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414809614
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87428
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID79140
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7165
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414881648
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID67933
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421170388
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID170789
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419516895
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415740229
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393758
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7623
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419554492
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23418553
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11073554
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID79204
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414862845
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414871393
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID79693
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415746993
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID92629
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414872365
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12793
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415994539
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21867794
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22223015
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID70601
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6367228
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31215
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425992007
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415729714
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8738
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8198
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6661
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451561990
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415759948
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8188
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421062847
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID413999249
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21903316
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13830
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21903554
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421063912
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID413550325
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412218272
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11040
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426025815
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419485362
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456001950
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452816548
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523396
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410570457
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20473
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID28118
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8868
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426003048
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5166299
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24938371
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414883636
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415994517
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426023186
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23550620
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420170313
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID74544
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID236409
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9009
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21884954
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426002357
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420549279
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425164379
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66984
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414871394
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20222016
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62118
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419519470
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420663874
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414862436
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8054
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23414612
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13707225
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8472
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12691389
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22075879
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415757628
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12375
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451403949
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4208568
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID409245044
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6515
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21903081
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414859240
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11583
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416174372
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2760672
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419531968
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20498
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10541
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415767701
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7910
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21210
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12691394
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8165
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9815636
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13847
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415767842
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12691398
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87318336
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419484874
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410573784
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID424550791
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7895
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31357
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11118066
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID427803117
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458394673
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11954884
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419544299
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410502467
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID68419
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415755980
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419546339
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420171292
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419608268
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415730383
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419485471
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419521186
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410535142
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453395411
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID67045855
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420294459
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4275592
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458394667
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415738731
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419546195
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422089649
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID75130
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410572972
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420167136
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421453282
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID525734
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449279134
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414875038
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7540
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3790919
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6535
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17176
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419530476
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13134
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16241
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456171974
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8470
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22407283
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13075
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21919906
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22051740
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID139377
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421164088
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422989680
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14456
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31288
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7958
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414887309
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419516322

Total number of triples: 272.