Predicate |
Object |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-448 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C8-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-36 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-318 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-36 |
filingDate |
2015-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2018-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate |
2018-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-6361048-B2 |
titleOfInvention |
Method for producing metal carbonitride film or metalloid carbonitride film and apparatus for producing metal carbonitride film or metalloid carbonitride film |
priorityDate |
2014-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |