http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6358492-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C24-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B41-85 |
| filingDate | 2013-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2018-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-6358492-B2 |
| titleOfInvention | Plasma resistant material |
| priorityDate | 2012-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 31.