| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3246
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2006-32 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C28-042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-486
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-505
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01F17-218
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01F17-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-134
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C28-048
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-62222
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K5-14 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C4-134
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C4-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01F17-218
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C4-01 |
| filingDate |
2014-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2018-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-6312278-B2 |
| titleOfInvention |
Emissivity-tuned coating for semiconductor chamber components |
| priorityDate |
2014-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |