http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6273689-B2
Outgoing Links
Predicate | Object |
---|---|
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
filingDate | 2013-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2018-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2018-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-6273689-B2 |
titleOfInvention | Radiation sensitive resin composition, resist pattern forming method, polymer, compound and method for producing the same |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190039649-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102500910-B1 |
priorityDate | 2013-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 462.